Invention Grant
US08679994B2 Method of inspecting synthetic silicia glass molded body 有权
检查合成石英玻璃成型体的方法

  • Patent Title: Method of inspecting synthetic silicia glass molded body
  • Patent Title (中): 检查合成石英玻璃成型体的方法
  • Application No.: US13961499
    Application Date: 2013-08-07
  • Publication No.: US08679994B2
    Publication Date: 2014-03-25
  • Inventor: Masafumi Mizuguchi
  • Applicant: Nikon Corporation
  • Applicant Address: JP Tokyo
  • Assignee: Nikon Corporation
  • Current Assignee: Nikon Corporation
  • Current Assignee Address: JP Tokyo
  • Priority: JP2005-056108 20050301
  • Main IPC: C03C3/06
  • IPC: C03C3/06 G01N23/00
Method of inspecting synthetic silicia glass molded body
Abstract:
A method of inspecting a synthetic silica glass molded body includes: irradiating the synthetic silica glass molded body with a spectrum line of an Hg lamp having a wavelength of 248 nm; measuring light emitted by the synthetic silica glass molded body; and a procedure which may include screening a portion which satisfies a condition that a ratio of the bright line intensity and the fluorescent light intensity is of a certain value or less, or which may include determining whether a condition that a ratio of a minimum value and a maximum value of a measured fluorescent light intensity is in a certain range is satisfied or not.
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