Invention Grant
- Patent Title: Nonvolatile nano-electromechanical system device
- Patent Title (中): 非易失性纳米机电系统装置
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Application No.: US13566053Application Date: 2012-08-03
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Publication No.: US08681409B2Publication Date: 2014-03-25
- Inventor: David J. Frank , Guy Cohen
- Applicant: David J. Frank , Guy Cohen
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
A nonvolatile nano-electromechanical system device is provided and includes a cantilever structure, including a beam having an initial shape, which is supported at one end thereof by a supporting base and a beam deflector, including a phase change material (PCM), disposed on a portion of the beam in a non-slip condition with a material of the beam, the PCM taking one of an amorphous phase or a crystalline phase and deflecting the beam from the initial shape when taking the crystalline phase.
Public/Granted literature
- US20120293236A1 NONVOLATILE NANO-ELECTROMECHANICAL SYSTEM DEVICE Public/Granted day:2012-11-22
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