Invention Grant
- Patent Title: Heat shield module for substrate-like metrology device
- Patent Title (中): 用于基板状测量装置的隔热模块
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Application No.: US13104874Application Date: 2011-05-10
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Publication No.: US08681493B2Publication Date: 2014-03-25
- Inventor: Vaibhaw Vishal , Mei Sun
- Applicant: Vaibhaw Vishal , Mei Sun
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: JDI Patent
- Agent Joshua D. Isenberg
- Main IPC: H05K7/20
- IPC: H05K7/20

Abstract:
A heat shield module includes top and bottom portions made of a high heat material. The top and bottom portions attached to each other and form an enclosure with an opening sized to receive an electronic component package with no intervening insulating material between a component and the top and bottom portions. One or more legs are mounted to either the top portion or the bottom portion. The legs are configured to attach the enclosure to a substrate and to form a gap between the bottom surface of the bottom portion and a top surface of the substrate.
Public/Granted literature
- US20120287574A1 HEAT SHIELD MODULE FOR SUBSTRATE-LIKE METROLOGY DEVICE Public/Granted day:2012-11-15
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