Invention Grant
US08681493B2 Heat shield module for substrate-like metrology device 有权
用于基板状测量装置的隔热模块

Heat shield module for substrate-like metrology device
Abstract:
A heat shield module includes top and bottom portions made of a high heat material. The top and bottom portions attached to each other and form an enclosure with an opening sized to receive an electronic component package with no intervening insulating material between a component and the top and bottom portions. One or more legs are mounted to either the top portion or the bottom portion. The legs are configured to attach the enclosure to a substrate and to form a gap between the bottom surface of the bottom portion and a top surface of the substrate.
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