Invention Grant
US08684499B2 Method for forming an aperture and actuator layer for an inkjet printhead 有权
用于形成用于喷墨打印头的孔和致动器层的方法

Method for forming an aperture and actuator layer for an inkjet printhead
Abstract:
A method enables multiple inkjet printhead dies to be manufactured by bonding a single wafer to a single polymer layer. Multiple die sites on the single wafer are arranged in a predetermined pattern that corresponds to the pattern in which a plurality of aperture arrays are arranged in the polymer layer. The die sites on the wafer and the aperture arrays in polymer layer are aligned, the wafer and polymer layer are bonded, and the bonded wafer and polymer layer are cut to form a plurality of inkjet printhead dies.
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