Invention Grant
- Patent Title: Method for growing silicon carbide single crystal
- Patent Title (中): 生长碳化硅单晶的方法
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Application No.: US12599520Application Date: 2008-11-18
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Publication No.: US08685163B2Publication Date: 2014-04-01
- Inventor: Yukio Terashima , Yasuyuki Fujiwara
- Applicant: Yukio Terashima , Yasuyuki Fujiwara
- Applicant Address: JP Toyota-shi, Aichi-ken
- Assignee: Toyota Jidosha Kabushiki Kaisha
- Current Assignee: Toyota Jidosha Kabushiki Kaisha
- Current Assignee Address: JP Toyota-shi, Aichi-ken
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JP2007-306367 20071127
- International Application: PCT/JP2008/071277 WO 20081118
- International Announcement: WO2009/069564 WO 20090604
- Main IPC: C30B19/02
- IPC: C30B19/02

Abstract:
A method for growing a silicon carbide single crystal on a single crystal substrate comprising the steps of heating silicon in a graphite crucible to form a melt, bringing a silicon carbide single crystal substrate into contact with the melt, and depositing and growing a silicon carbide single crystal from the melt, wherein the melt comprises 30 to 70 percent by atom, based on the total atoms of the melt, of chromium and 1 to 25 percent by atom, based on the total atoms of the melt, of X, where X is at least one selected from the group consisting of nickel and cobalt, and carbon. It is possible to improve morphology of a surface of the crystal growth layer obtained by a solution method.
Public/Granted literature
- US20100236472A1 METHOD FOR GROWING SILICON CARBIDE SINGLE CRYSTAL Public/Granted day:2010-09-23
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