Invention Grant
US08685262B2 Method for manufacturing a nozzle plate containing multiple micro-orifices for cascade impactor
有权
用于制造含有用于级联冲击器的多个微孔的喷嘴板的方法
- Patent Title: Method for manufacturing a nozzle plate containing multiple micro-orifices for cascade impactor
- Patent Title (中): 用于制造含有用于级联冲击器的多个微孔的喷嘴板的方法
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Application No.: US14043239Application Date: 2013-10-01
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Publication No.: US08685262B2Publication Date: 2014-04-01
- Inventor: Chuen-Jinn Tsai , Sheng-Chieh Chen , Hong-Dar Chen
- Applicant: National Chiao Tung University
- Applicant Address: TW Hsinchu
- Assignee: National Chiao Tung University
- Current Assignee: National Chiao Tung University
- Current Assignee Address: TW Hsinchu
- Agency: Bacon & Thomas, PLLC
- Priority: TW99105869A 20100301
- Main IPC: C23F1/00
- IPC: C23F1/00
Abstract:
A nozzle plate containing multiple micro-orifices for the cascade impactor and a method for manufacturing the same are disclosed. The nozzle plate is formed by a series of semiconductor processes, including lithography, etching and electroplating. The nozzle plate comprises a plate body and a plurality of micro-orifices formed on the plate body. The orifice has a diameter which gradually expands in the direction away from the bottom of the plate body to achieve a smooth inner surface, allowing particles to pass therethrough smoothly without being clogged in the nozzle plate.
Public/Granted literature
- US20140027406A1 METHOD FOR MANUFACTURING A NOZZLE PLATE CONTAINING MULTIPLE MICRO-ORIFICES FOR CASCADE IMPACTOR Public/Granted day:2014-01-30
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