Invention Grant
- Patent Title: Pellicle and mask adhesive therefor
- Patent Title (中): 防护薄膜和面膜粘合剂
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Application No.: US13500513Application Date: 2010-10-06
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Publication No.: US08685598B2Publication Date: 2014-04-01
- Inventor: Shuichi Murakami , Takashi Kozeki , Minehiro Mori
- Applicant: Shuichi Murakami , Takashi Kozeki , Minehiro Mori
- Applicant Address: JP Minato-Ku, Tokyo
- Assignee: Mitsui Chemicals, Inc.
- Current Assignee: Mitsui Chemicals, Inc.
- Current Assignee Address: JP Minato-Ku, Tokyo
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: JP2009-233576 20091007
- International Application: PCT/JP2010/005996 WO 20101006
- International Announcement: WO2011/043071 WO 20110414
- Main IPC: G03F1/00
- IPC: G03F1/00 ; C08L23/00

Abstract:
Disclosed is a pellicle having a mask adhesive layer having appropriate softness, having a small adhesive residue after being peeled off from a mask, and having good handling characteristics; and a pellicle for preventing position deviation of patterns, in particular in double patterning. The pellicle of the present invention includes a pellicle frame, a pellicle membrane disposed on one end surface of the pellicle frame, and a mask adhesive layer disposed on other end surface of the pellicle frame; wherein the mask adhesive layer includes 35 to 170 weight parts of a hardness adjuster (B) containing a polypropylene (b1) and a propylene based elastomer (b2) per 100 weight parts of a styrene resin (A); and in an electron microscopic photograph of the mask adhesive layer, a phase-separated structure of a continuous phase of the styrene resin (A) and a discontinuous phase of the hardness adjuster (B) is observed.
Public/Granted literature
- US20120202144A1 PELLICLE AND MASK ADHESIVE THEREFOR Public/Granted day:2012-08-09
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