Invention Grant
- Patent Title: Resist composition and method for producing resist pattern
- Patent Title (中): 抗蚀剂组合物和抗蚀剂图案的制造方法
-
Application No.: US13552273Application Date: 2012-07-18
-
Publication No.: US08685619B2Publication Date: 2014-04-01
- Inventor: Koji Ichikawa , Yuichi Mukai , Satoshi Yamamoto
- Applicant: Koji Ichikawa , Yuichi Mukai , Satoshi Yamamoto
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Chemcial Company, Limited
- Current Assignee: Sumitomo Chemcial Company, Limited
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2011-157536 20110719
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/20 ; G03F7/30 ; G03F7/38
Abstract:
A resist composition having a resin having a structural unit represented by the formula (I), a resin being insoluble or poorly soluble in alkali aqueous solution, but becoming soluble in an alkali aqueous solution by the action of an acid and not including the structural unit represented by the formula (I), and an acid generator represented by the formula (II), wherein R1, A1, A13, A14, X12, R23, R24, R25, X21 and Z1+ are defined in the specification.
Public/Granted literature
- US20130022922A1 RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN Public/Granted day:2013-01-24
Information query
IPC分类:
