Invention Grant
- Patent Title: Multiple gate dielectric structures and methods of forming the same
- Patent Title (中): 多栅电介质结构及其形成方法
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Application No.: US13207643Application Date: 2011-08-11
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Publication No.: US08685820B2Publication Date: 2014-04-01
- Inventor: Hsiao-Hui Tseng , Dun-Nian Yaung , Jen-Cheng Liu , Wen-I Hsu , Min-Feng Kao
- Applicant: Hsiao-Hui Tseng , Dun-Nian Yaung , Jen-Cheng Liu , Wen-I Hsu , Min-Feng Kao
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
The present disclosure provides for multiple gate dielectric semiconductor structures and methods of forming such structures. In one embodiment, a method of forming a semiconductor structure includes providing a substrate including a pixel array region, an input/output (I/O) region, and a core region. The method further includes forming a first gate dielectric layer over the pixel array region, forming a second gate dielectric layer over the I/O region, and forming a third gate dielectric layer over the core region, wherein the first gate dielectric layer, the second gate dielectric layer, and the third gate dielectric layer are each formed to be comprised of a different material and to have a different thickness.
Public/Granted literature
- US20130037890A1 MULTIPLE GATE DIELECTRIC STRUCTURES AND METHODS OF FORMING THE SAME Public/Granted day:2013-02-14
Information query
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