Invention Grant
- Patent Title: Doping of nanostructures
- Patent Title (中): 掺杂纳米结构
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Application No.: US11960653Application Date: 2007-12-19
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Publication No.: US08685877B2Publication Date: 2014-04-01
- Inventor: Francesca Iacopi , Philippe M. Vereecken
- Applicant: Francesca Iacopi , Philippe M. Vereecken
- Applicant Address: BE Leuven
- Assignee: IMEC
- Current Assignee: IMEC
- Current Assignee Address: BE Leuven
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: EP07009495 20070511
- Main IPC: B01J21/00
- IPC: B01J21/00 ; B01J23/04 ; B01J21/02 ; B01J27/00 ; B01J27/02 ; B01J23/06

Abstract:
A catalyst particle for use in growth of elongated nanostructures, such as e.g. nanowires, is provided. The catalyst particle comprises a catalyst compound for catalyzing growth of an elongated nanostructure comprising a nanostructure material without substantially dissolving in the nanostructure material and at least one dopant element for doping the elongated nanostructure during growth by substantially completely dissolving in the nanostructure material. A method for forming an elongated nanostructure, e.g. nanowire, on a substrate using the catalyst particle is also provided. The method allows controlling dopant concentration in the elongated nanostructures, e.g. nanowires, and allows elongated nanostructures with a low dopant concentration of lower than 1017 atoms/cm3 to be obtained.
Public/Granted literature
- US20100096618A1 DOPING OF NANOSTRUCTURES Public/Granted day:2010-04-22
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