Invention Grant
- Patent Title: Methods and materials for removing metals in block copolymers
- Patent Title (中): 用于去除嵌段共聚物中金属的方法和材料
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Application No.: US13416669Application Date: 2012-03-09
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Publication No.: US08686109B2Publication Date: 2014-04-01
- Inventor: Jian Yin , Hengpeng Wu , Muthiah Thiyagarajan , SungEun Hong , Mark Neisser , Yi Cao
- Applicant: Jian Yin , Hengpeng Wu , Muthiah Thiyagarajan , SungEun Hong , Mark Neisser , Yi Cao
- Applicant Address: LU Luxembourg
- Assignee: AZ Electronic Materials (Luxembourg) S.A.R.L.
- Current Assignee: AZ Electronic Materials (Luxembourg) S.A.R.L.
- Current Assignee Address: LU Luxembourg
- Agent Sangya Jain
- Main IPC: C08F6/00
- IPC: C08F6/00 ; C08G63/02
Abstract:
The present invention relates to a method for treating a block copolymer solution, wherein the method comprises: providing a solution comprising a block copolymer in a non aqueous solvent; and, treating the solution to remove metals using an ion exchange resin. The invention also relates to a method of forming patterns using the treated block copolymer.
Public/Granted literature
- US20130233827A1 METHODS AND MATERIALS FOR REMOVING METALS IN BLOCK COPOLYMERS Public/Granted day:2013-09-12
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