Invention Grant
- Patent Title: Dynamic wavefront control of a frequency converted laser system
- Patent Title (中): 变频激光系统的动态波前控制
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Application No.: US13194335Application Date: 2011-07-29
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Publication No.: US08686331B2Publication Date: 2014-04-01
- Inventor: J. Joseph Armstrong
- Applicant: J. Joseph Armstrong
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01J1/20
- IPC: G01J1/20
Abstract:
The present invention is directed to a laser system in which a current laser wavefront performance of the laser system may be monitored. Further, the laser system embodiments disclosed herein may be configured for correcting the laser wavefront internally via correction system(s) within the laser system. Still further, the correction system(s) disclosed herein may provide a long lifetime of performance and may be configured for having a minimal impact on photocontamination.
Public/Granted literature
- US20120032065A1 DYNAMIC WAVEFRONT CONTROL OF A FREQUENCY CONVERTED LASER SYSTEM Public/Granted day:2012-02-09
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