Invention Grant
- Patent Title: Phase-change random access memory device and method of manufacturing the same
- Patent Title (中): 相变随机存取存储器件及其制造方法
-
Application No.: US13337421Application Date: 2011-12-27
-
Publication No.: US08686385B2Publication Date: 2014-04-01
- Inventor: Jin Seok Yang , Ha Chang Jung
- Applicant: Jin Seok Yang , Ha Chang Jung
- Applicant Address: KR Gyeonggi-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2011-0001761 20110107
- Main IPC: H01L29/02
- IPC: H01L29/02 ; H01L47/00

Abstract:
The PCRAM device includes a semiconductor substrate including a switching device; an interlayer insulating layer having a heating electrode contact hole exposing the switching device, a heating electrode formed to be extended along a side of the interlayer insulating layer in the heating electrode contact hole, wherein the heating electrode has a width gradually increased toward a bottom of the heating electrode and is in contact with the switching device, first and second phase-change layers formed within the heating electrode contact hole that includes the heating electrode, and a phase-change separation layer formed in the heating electrode contact hole between the first and second phase-change layers.
Public/Granted literature
- US20120175582A1 PHASE-CHANGE RANDOM ACCESS MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2012-07-12
Information query
IPC分类: