Invention Grant
US08686426B2 Thin film transistor having plural semiconductive oxides, thin film transistor array panel and display device including the same, and manufacturing method of thin film transistor
有权
具有多个半导体氧化物的薄膜晶体管,薄膜晶体管阵列面板及包括该半导体氧化物的显示装置以及薄膜晶体管的制造方法
- Patent Title: Thin film transistor having plural semiconductive oxides, thin film transistor array panel and display device including the same, and manufacturing method of thin film transistor
- Patent Title (中): 具有多个半导体氧化物的薄膜晶体管,薄膜晶体管阵列面板及包括该半导体氧化物的显示装置以及薄膜晶体管的制造方法
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Application No.: US13555889Application Date: 2012-07-23
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Publication No.: US08686426B2Publication Date: 2014-04-01
- Inventor: Byung Du Ahn , Ji Hun Lim , Gun Hee Kim , Kyoung Won Lee , Je Hun Lee
- Applicant: Byung Du Ahn , Ji Hun Lim , Gun Hee Kim , Kyoung Won Lee , Je Hun Lee
- Applicant Address: KR JP
- Assignee: Samsung Display Co., Ltd.,Kobe Steel, Ltd.
- Current Assignee: Samsung Display Co., Ltd.,Kobe Steel, Ltd.
- Current Assignee Address: KR JP
- Agency: Innovation Counsel LLP
- Priority: KR10-2012-0034101 20120402
- Main IPC: H01L27/14
- IPC: H01L27/14

Abstract:
A plural semiconductive oxides TFT (sos-TFT) provides improved electrical functionality in terms of charge-carrier mobility and/or threshold voltage variability. The sos-TFT may be used to form a thin film transistor array panel for display devices. An example sos-TFT includes: an insulated gate electrode; a first semiconductive oxide layer having a composition including a first semiconductive oxide; and a second semiconductive oxide layer having a different composition that also includes a semiconductive oxide. The first and second semiconductive oxide layers have respective channel regions that are capacitively influenced by a control voltage applied to the gate electrode. In one embodiment, the second semiconductive oxide layer includes at least one additional element that is not included in the first semiconductive oxide layer where the additional element is one of gallium (Ga), silicon (Si), niobium (Nb), hafnium (Hf), and germanium (Ge).
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