- Patent Title: Non-volatile FINFET memory device and manufacturing method thereof
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Application No.: US12722083Application Date: 2010-03-11
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Publication No.: US08686492B2Publication Date: 2014-04-01
- Inventor: Chun Chen , Shenqing Fang
- Applicant: Chun Chen , Shenqing Fang
- Applicant Address: US CA Sunnyvale
- Assignee: Spansion LLC
- Current Assignee: Spansion LLC
- Current Assignee Address: US CA Sunnyvale
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/788 ; H01L29/792

Abstract:
Methods for fabricating an electronic device and electronic devices therefrom are provided. A method includes forming one or more masking layers on a semiconducting surface of a substrate and forming a plurality of dielectric isolation features and a plurality of fin-type projections using the masking layer. The method also includes processing the masking layers and the plurality of fin-type projections to provide an inverted T-shaped cross-section for the plurality of fin-type projections that includes a distal extension portion and a proximal base portion. The method further includes forming a plurality of bottom gate layers on the distal extension portion and forming a plurality of control gate layers on the plurality of dielectric isolation features and the plurality of bottom gate layers.
Public/Granted literature
- US20110220981A1 NON-VOLATILE FINFET MEMORY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2011-09-15
Information query
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