Invention Grant
US08686740B2 Calibration method for inertial drive actuator, and inertial drive actuator device 有权
惯性驱动执行器和惯性驱动执行器装置的校准方法

Calibration method for inertial drive actuator, and inertial drive actuator device
Abstract:
A calibration method for an inertial drive actuator of detecting a position of a moving body based on an electrostatic capacitance is proposed. The calibration method includes driving the moving body; outputting a first signal for detecting the electrostatic capacitance of opposing parts of a moving body side electrode provided on the moving body and a detecting electrode provided opposing the moving body side electrode; receiving a second signal obtained after the first signal output at the outputting has passed through the moving body side electrode and the detecting electrode; and calculating an optimum first signal based on the second signal received at the receiving.
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