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US08687166B2 Lithographic apparatus having an encoder position sensor system 有权
光刻设备具有编码器位置传感器系统

Lithographic apparatus having an encoder position sensor system
Abstract:
A lithographic apparatus is disclosed that includes an encoder type sensor system configured to measure a position of a substrate table of the lithographic apparatus relative to a reference structure. The encoder type sensor system includes an encoder sensor head and an encoder sensor target and the lithographic apparatus comprises a recess to accommodate the encoder sensor target.
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