Invention Grant
- Patent Title: Optical aperture device
- Patent Title (中): 光孔设备
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Application No.: US12894890Application Date: 2010-09-30
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Publication No.: US08687169B2Publication Date: 2014-04-01
- Inventor: Hermann Bieg , Uy-Liem Nguyen
- Applicant: Hermann Bieg , Uy-Liem Nguyen
- Applicant Address: DE Oberkocken
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkocken
- Agency: Fish & Richardson P.C.
- Main IPC: G03B27/72
- IPC: G03B27/72 ; G03B27/54

Abstract:
An optical module includes an aperture device and a support structure supporting the aperture device. The aperture device defines an aperture edge and an aperture plane. The aperture edge is adapted to define a geometry of a light beam passing the aperture device along an optical axis. The support structure is adapted to hold the aperture device in a defined manner when the aperture plane is inclined with respect to a horizontal plane. A temperature distribution prevails within the aperture device and at least one of the aperture device and the support structure is adapted to maintain at least one of a relative position of the aperture edge with respect to the optical axis and a geometry of the aperture edge substantially unaltered upon an introduction of a thermal energy into the aperture device, where the thermal energy being adapted to cause an alteration in the temperature distribution.
Public/Granted literature
- US20110063595A1 OPTICAL APERTURE DEVICE Public/Granted day:2011-03-17
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