Invention Grant
- Patent Title: Electromagnetic actuator, stage apparatus and lithographic apparatus
- Patent Title (中): 电磁执行器,平台设备和光刻设备
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Application No.: US13401560Application Date: 2012-02-21
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Publication No.: US08687171B2Publication Date: 2014-04-01
- Inventor: Sven Antoin Johan Hol , Jan Van Eijk , Johannes Petrus Martinus Bernardus Vermeulen , Gerard Johannes Pieter Nijsse , Simon Bernardus Cornelis Maria Martens , Yang-Shan Huang , Michael Wilhelmus Theodorus Koot , Jeroen De Boeij , Maarten Hartger Kimman , Wei Zhou
- Applicant: Sven Antoin Johan Hol , Jan Van Eijk , Johannes Petrus Martinus Bernardus Vermeulen , Gerard Johannes Pieter Nijsse , Simon Bernardus Cornelis Maria Martens , Yang-Shan Huang , Michael Wilhelmus Theodorus Koot , Jeroen De Boeij , Maarten Hartger Kimman , Wei Zhou
- Applicant Address: NE Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NE Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G03B27/58
- IPC: G03B27/58 ; G03B27/62 ; H02K41/02

Abstract:
An electromagnetic actuator includes a first and second magnetic members that are displaceable relative to each other and are arranged to provide a magnetic circuit; and a coil configured to, in use, receive a current to generate a magnetic flux through the magnetic circuit, thereby generating a force between the first and second magnetic members in a first direction, the magnetic flux, in use, being transferred between the first and second magnetic members through a first surface of the first magnetic member and a second surface of the second magnetic member, the first and second surface being separated by an airgap, wherein the first surface and the second surface are arranged relative to each other such that an outer dimension of the first surface extends beyond an outer dimension of the second surface in a second direction substantially perpendicular to the first direction.
Public/Granted literature
- US20120212723A1 ELECTROMAGNETIC ACTUATOR, STAGE APPARATUS AND LITHOGRAPHIC APPARATUS Public/Granted day:2012-08-23
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