Invention Grant
US08687183B2 Imprint apparatus, detection method, article manufacturing method, and foreign particle detection apparatus 有权
印刷装置,检测方法,制品制造方法和异物检测装置

Imprint apparatus, detection method, article manufacturing method, and foreign particle detection apparatus
Abstract:
The present invention provides an imprint apparatus for performing an imprint process of transferring a pattern onto a substrate by curing a resin on the substrate while the resin is in contact with a mold, and removing the mold from the cured resin, including a detection unit configured to detect a foreign particle existing on the substrate, wherein the detection unit includes an obtaining unit configured to irradiate a surface of the substrate with light, and obtain light from the surface of the substrate, and a specification unit configured to specify a shot region where a foreign particle existing on the substrate is positioned, based on the light obtained by the obtaining unit.
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