Invention Grant
US08689358B2 Dynamic mode nano-scale imaging and position control using deflection signal direct sampling of higher mode-actuated microcantilevers
有权
动态模式纳米尺度成像和位置控制使用偏转信号直接采样更高模式致动的微型悬臂
- Patent Title: Dynamic mode nano-scale imaging and position control using deflection signal direct sampling of higher mode-actuated microcantilevers
- Patent Title (中): 动态模式纳米尺度成像和位置控制使用偏转信号直接采样更高模式致动的微型悬臂
-
Application No.: US12824337Application Date: 2010-06-28
-
Publication No.: US08689358B2Publication Date: 2014-04-01
- Inventor: Venkataraman Kartik , Charalampos Pozidis , Deepak R. Sahoo , Abu Sebastian
- Applicant: Venkataraman Kartik , Charalampos Pozidis , Deepak R. Sahoo , Abu Sebastian
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Daniel Morris
- Main IPC: G01Q10/00
- IPC: G01Q10/00 ; G01Q20/02
Abstract:
An apparatus is provided and includes a cantilever having a tip at a distal end thereof disposed with the tip positioned an initial distance from a sample and a circuit electrically coupled to a substrate on which the sample is layered and the cantilever to simultaneously apply direct and alternating currents to deflect the cantilever and to cause the tip to oscillate about a point at a second distance from the sample, which is shorter than the initial distance, between first positions, at which the tip contacts the sample, and second positions, at which the tip is displaced from the sample.
Public/Granted literature
Information query
