Invention Grant
- Patent Title: Method for manufacturing surface acoustic wave element
- Patent Title (中): 声表面波元件的制造方法
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Application No.: US12845849Application Date: 2010-07-29
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Publication No.: US08689416B2Publication Date: 2014-04-08
- Inventor: Yoshiki Ryu , Masashi Omura
- Applicant: Yoshiki Ryu , Masashi Omura
- Applicant Address: JP Kyoto
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2009-186635 20090811
- Main IPC: H03H3/08
- IPC: H03H3/08 ; H01L41/053

Abstract:
A method for manufacturing a surface acoustic wave element that prevents curvature of a piezoelectric substrate when forming an electrode pattern includes a first step of bonding to a first principal surface of a piezoelectric substrate a support member having a linear expansion coefficient lower than a linear expansion coefficient of the piezoelectric substrate to form a composite substrate, a second step of forming a plurality of grooves in the support member of the composite substrate from a surface that is opposite to a bonding interface between the support member and the piezoelectric substrate, a third step of forming electrode patterns including at least one IDT electrode on a second principal surface of the piezoelectric substrate of the composite substrate, and a fourth step of dividing the composite substrate on which the electrode patterns are formed to form individual surface acoustic wave elements.
Public/Granted literature
- US20110035915A1 METHOD FOR MANUFACTURING SURFACE ACOUSTIC WAVE ELEMENT Public/Granted day:2011-02-17
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