Invention Grant
- Patent Title: Thermal gas sensor
- Patent Title (中): 热气传感器
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Application No.: US12973376Application Date: 2010-12-20
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Publication No.: US08689608B2Publication Date: 2014-04-08
- Inventor: Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Keiji Hanzawa
- Applicant: Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Keiji Hanzawa
- Applicant Address: JP Hitachinaka-shi
- Assignee: Hitachi Automotive Systems, Ltd.
- Current Assignee: Hitachi Automotive Systems, Ltd.
- Current Assignee Address: JP Hitachinaka-shi
- Agency: Crowell & Moring LLP
- Priority: JP2009-296665 20091228
- Main IPC: G01N25/18
- IPC: G01N25/18

Abstract:
The present invention provides a high-responsiveness and high-accuracy thermal gas sensor configured to enable gas to be analyzed based on a variation in heat conductivity. The thermal gas sensor includes a substrate 2 with a cavity portion 5, a thin-film support 6 stacked in the cavity portion and comprising a plurality of insulating layers 8a and 8b, and a first heating member 3 and a second heating member 4 both sandwiched between the insulating layers in the thin-film support. The second heating member is located around a periphery of the first heating member. The first heating member is controlled to a temperature higher than a temperature to which the second heating member is controlled. The concentration of ambient gas is measured based on power applied to the first heating member.
Public/Granted literature
- US20110154885A1 Thermal Gas Sensor Public/Granted day:2011-06-30
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