Invention Grant
- Patent Title: Pressure regulation in remote zones
- Patent Title (中): 偏远地区的压力调节
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Application No.: US13271447Application Date: 2011-10-12
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Publication No.: US08689822B2Publication Date: 2014-04-08
- Inventor: Ali Shajii , Siddharth P. Nagarkatti , Gordon Hill
- Applicant: Ali Shajii , Siddharth P. Nagarkatti , Gordon Hill
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: McDermott Will & Emery LLP
- Main IPC: F16K31/02
- IPC: F16K31/02

Abstract:
A pressure control system remotely controls pressure within one or more remote zones, each respectively connected to an enclosure through a conduit, by controlling flow of a fluid into and out of each enclosure. The pressure of the fluid is measured within each enclosure. An estimated pressure within each zone is computed, as a function of the measured pressure in the enclosure and known characteristics of the conduit and the zone. For each zone, an inlet proportional valve and an outlet proportional valve of each enclosure is operated so as to control the input flow rate of the fluid into the respective enclosure and the output flow rate of the fluid out of the enclosure as a function of a pressure set point and the estimated pressure, thereby regulating pressure within the zone in accordance with the pressure set point.
Public/Granted literature
- US20120202408A1 PRESSURE REGULATION IN REMOTE ZONES Public/Granted day:2012-08-09
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