A modulated signal is generated by performing pulse modulation of a drive waveform signal that is a reference for a drive signal to be applied to a capacitive load, and the drive signal is generated by performing power amplification of the acquired modulated signal and then smoothing the power-amplified modulated signal. Then, negative feedback of the drive signal applied to the capacitive load is applied to the drive waveform signal that is the reference for the drive signal. At this time, a predetermined analog compensation process for smoothing gain characteristics in a frequency band included in the drive signal is performed for the drive signal, then the acquired signal is converted into a digital signal, and negative feedback of the digital signal is applied to the drive waveform signal.