Invention Grant
US08690489B2 Method and system for locally controlling support of a flat object 有权
用于本地控制平面物体支撑的方法和系统

Method and system for locally controlling support of a flat object
Abstract:
A non-contact support platform system is provided for supporting a substantially flat object. The system includes a platform with a first plurality of pressure ports and a first plurality of vacuum ports for inducing a fluid cushion to support the object at a distance from the platform. The system further includes a second plurality of pressure ports located at a predetermined zone of the platform for increasing the distance of the object from the platform at the predetermined zone.
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