Invention Grant
- Patent Title: Vacuum pump
- Patent Title (中): 真空泵
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Application No.: US12999137Application Date: 2009-07-14
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Publication No.: US08690525B2Publication Date: 2014-04-08
- Inventor: Yoshinobu Ohtachi , Manabu Nonaka , Yasushi Maejima
- Applicant: Yoshinobu Ohtachi , Manabu Nonaka , Yasushi Maejima
- Applicant Address: JP Chiba
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Chiba
- Agency: Westman, Champlin & Koehler, P.A.
- Priority: JP2008-182364 20080714; JP2008-182365 20080714
- International Application: PCT/JP2009/062708 WO 20090714
- International Announcement: WO2010/007975 WO 20100121
- Main IPC: F04D29/00
- IPC: F04D29/00

Abstract:
A vacuum pump includes a casing having an inlet port and an outlet port, a stator portion provided inside the casing and a rotor portion having a shaft rotatably supported inside the casing and a rotor disposed on the shaft and provided with a gas transfer mechanism that transfers a gas from the inlet port to the outlet port. The rotor portion is arranged with a predetermined clearance between the rotor portion and the stator portion. A motor rotates the shaft. Vibration detection disposed in the stator portion detects vibrations by converting vibration amplitude to an electric signal. Contact detection judges an occurrence of contact between the stator portion and the rotor portion when, in the vibration detected by the vibration detection, an amplitude in frequency of a specific vibration caused by contact between the stator portion and the rotor portion exceeds a predetermined threshold value.
Public/Granted literature
- US20110103934A1 VACUUM PUMP Public/Granted day:2011-05-05
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