Invention Grant
- Patent Title: Concave and convex micromirrors and methods of making the same
- Patent Title (中): 凹凸微镜及其制作方法
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Application No.: US11450236Application Date: 2006-06-09
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Publication No.: US08691100B2Publication Date: 2014-04-08
- Inventor: Dah-Chuen Ho , Eugene Chu , Yuh-Haw Chang , Fei-Yun Chen , Michael Wu , Eric Chao
- Applicant: Dah-Chuen Ho , Eugene Chu , Yuh-Haw Chang , Fei-Yun Chen , Michael Wu , Eric Chao
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co. Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co. Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Tung & Associates
- Main IPC: B29D11/00
- IPC: B29D11/00 ; G02B26/00
Abstract:
A method comprising providing a first substrate and forming a first sacrificial layer over the first substrate, the first sacrificial layer comprising a curved surface portion, and forming a curved micromirror by depositing a reflective material over at the curved surface portion.
Public/Granted literature
- US20070285760A1 Concave and convex micromirrors and methods of making the same Public/Granted day:2007-12-13
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