Invention Grant
US08691367B2 Micro channel structure body and method of manufacturing micro channel structure body 有权
微通道结构体及微通道结构体制造方法

Micro channel structure body and method of manufacturing micro channel structure body
Abstract:
A micro channel structure body 10 in which a micro channel 3 having a predetermined cross-sectional shape is formed in a laminate where substrates 1a, 1b, and 1c having formed thereon electrodes 2a, 2b, and 2c made of a thin film are laminated sequentially. The above-mentioned micro channel 3 is formed in a perpendicular direction β perpendicular to a lamination direction α of the above-mentioned laminate. Inner surfaces 3a and 3b of the above-mentioned micro channel 3 have an acute angle θ with respect to the lamination direction α of the above-mentioned laminate. The above-mentioned plurality of electrodes 2a, 2b, and 2c are formed and exposed in the lamination direction α of the inner surfaces 3a and 3b of the above-mentioned micro channel 3.
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