Invention Grant
- Patent Title: Magnetoresistive element and method of manufacturing the same
- Patent Title (中): 磁阻元件及其制造方法
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Application No.: US13604457Application Date: 2012-09-05
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Publication No.: US08691596B2Publication Date: 2014-04-08
- Inventor: Akiko Nomachi
- Applicant: Akiko Nomachi
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
According to one embodiment, a magnetoresistive element manufacturing method is provided. In this magnetoresistive element manufacturing method, a first ferromagnetic layer, tunnel barrier layer, and second ferromagnetic layer are sequentially formed on a substrate. A conductive hard mask is formed on the second ferromagnetic layer. The hard mask is patterned. A hard layer is formed on the side surface of the hard mask. The second ferromagnetic layer, tunnel barrier layer, and first ferromagnetic layer are processed by IBE in an oblique direction by using the hard mask and hard layer as masks. The IBE etching rate of the hard layer is lower than that of the hard mask.
Public/Granted literature
- US20130241015A1 MAGNETORESISTIVE ELEMENT AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2013-09-19
Information query
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