Invention Grant
- Patent Title: Method for removing germanium suboxide
- Patent Title (中): 除去低氧化锗的方法
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Application No.: US13590090Application Date: 2012-08-20
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Publication No.: US08691636B2Publication Date: 2014-04-08
- Inventor: Po-Tsun Liu , Chen-Shuo Huang
- Applicant: Po-Tsun Liu , Chen-Shuo Huang
- Applicant Address: TW Hsinchu
- Assignee: National Chiao Tung University
- Current Assignee: National Chiao Tung University
- Current Assignee Address: TW Hsinchu
- Agency: DLA Piper LLP (US)
- Priority: TW101100190A 20120103
- Main IPC: H01L21/335
- IPC: H01L21/335 ; H01L21/8232
Abstract:
A method for removing germanium suboxide between a germanium (Ge) substrate and a dielectric layer made of metal oxide includes causing a supercritical fluid composition that includes a supercritical carbon dioxide fluid and an oxidant to diffuse into the germanium suboxide such that metal residues in the dielectric layer, the germanium suboxide and the oxidant are subjected to a redox reaction so as to reduce the germanium suboxide into germanium.
Public/Granted literature
- US20130171830A1 METHOD FOR REMOVING GERMANIUM SUBOXIDE Public/Granted day:2013-07-04
Information query
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