Invention Grant
US08691656B2 Methods of forming an interconnect between a substrate bit line contact and a bit line in DRAM
有权
在DRAM中形成衬底位线接触和位线之间的互连的方法
- Patent Title: Methods of forming an interconnect between a substrate bit line contact and a bit line in DRAM
- Patent Title (中): 在DRAM中形成衬底位线接触和位线之间的互连的方法
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Application No.: US13226787Application Date: 2011-09-07
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Publication No.: US08691656B2Publication Date: 2014-04-08
- Inventor: Brett W. Busch , David K. Hwang , F. Daniel Gealy
- Applicant: Brett W. Busch , David K. Hwang , F. Daniel Gealy
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John, PS
- Main IPC: H01L21/8242
- IPC: H01L21/8242

Abstract:
The invention includes methods of electrically interconnecting different elevation conductive structures, methods of forming capacitors, methods of forming an interconnect between a substrate bit line contact and a bit line in DRAM, and methods of forming DRAM memory cells. In one implementation, a method of electrically interconnecting different elevation conductive structures includes forming a first conductive structure comprising a first electrically conductive surface at a first elevation of a substrate. A nanowhisker is grown from the first electrically conductive surface, and is provided to be electrically conductive. Electrically insulative material is provided about the nanowhisker. An electrically conductive material is deposited over the electrically insulative material in electrical contact with the nanowhisker at a second elevation which is elevationally outward of the first elevation, and the electrically conductive material is provided into a second conductive structure. Other aspects and implementations are contemplated.
Public/Granted literature
- US20110318921A1 Methods Of Forming An Interconnect Between A Substrate Bit Line Contact And A Bit Line In DRAM Public/Granted day:2011-12-29
Information query
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