Invention Grant
- Patent Title: Semiconductor component with trench isolation and corresponding production method
- Patent Title (中): 半导体元件具有沟槽绝缘和相应的生产方法
-
Application No.: US12883023Application Date: 2010-09-15
-
Publication No.: US08691660B2Publication Date: 2014-04-08
- Inventor: Franz Schuler , Georg Tempel
- Applicant: Franz Schuler , Georg Tempel
- Applicant Address: DE Munich
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Munich
- Priority: DE10233208 20020722
- Main IPC: H01L21/763
- IPC: H01L21/763

Abstract:
The invention relates to a semiconductor component with trench isolation and to an associated fabrication method, a trench isolation (STI, TTI) having a deep isolation trench with a covering insulation layer (10, 11), a side wall insulation layer (6) and an electrically conductive filling layer (7), which is electrically connected to a predetermined doping region (1) of the semiconductor substrate in a bottom region of the trench. The use of a trench contact (DTC), which has a deep contact trench with a side wall insulation layer (6) and an electrically conductive filling layer (7), which is likewise electrically connected to the predetermined doping region (1) of the semiconductor substrate in a bottom region of the contact trench, makes it possible to improve the electrical shielding properties with a reduced area requirement.
Public/Granted literature
- US20110003457A1 SEMICONDUCTOR COMPONENT WITH TRENCH INSULATION AND CORRESPONDING PRODUCTION METHOD Public/Granted day:2011-01-06
Information query
IPC分类: