Invention Grant
- Patent Title: Method for producing chip with adhesive applied
- Patent Title (中): 使用粘合剂生产芯片的方法
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Application No.: US12596047Application Date: 2008-04-15
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Publication No.: US08691666B2Publication Date: 2014-04-08
- Inventor: Takeshi Segawa , Naofumi Izumi
- Applicant: Takeshi Segawa , Naofumi Izumi
- Applicant Address: JP Tokyo
- Assignee: Lintec Corporation
- Current Assignee: Lintec Corporation
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2007-108150 20070417
- International Application: PCT/JP2008/057312 WO 20080415
- International Announcement: WO2008/129976 WO 20081030
- Main IPC: H01L21/78
- IPC: H01L21/78 ; H01L21/46 ; H01L21/301

Abstract:
A method for producing a chip (13) in which a die bonding adhesive layer (24) and a wafer (1) are laminated on a close-contact layer (31) of a fixing jig (3), the chip is formed by completely cutting the wafer and the die bonding adhesive layer and then the chip is picked up together with the die bonding adhesive layer from the fixing jig by deforming the close-contact layer of the fixing jig. In the method the fixing jig is provided with the close-contact layer and a jig base (30) that is provided with a plurality of protrusions (36) on one side and a sidewall (35) at the outer circumference section of the one side. The close-contact layer is laminated on the surface of the jig base provided with the protrusions and is bonded on the upper surface of the sidewall. On the surface of the jig base provided with the protrusions, a partitioned space is formed by the close-contact layer, the protrusions, and the sidewall. The jig base is provided with at least one through hole (38) penetrating the outside and the partitioned space, and the close-contact layer can be deformed by sucking air from the partitioned space via the through hole of the fixing jig.
Public/Granted literature
- US20100144120A1 Method for Producing Chip with Adhesive Applied Public/Granted day:2010-06-10
Information query
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