Invention Grant
- Patent Title: Method for producing group 3-5 nitride semiconductor and method for producing light-emitting device
- Patent Title (中): 第3-5组氮化物半导体的制造方法及其制造方法
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Application No.: US11992653Application Date: 2006-09-27
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Publication No.: US08691674B2Publication Date: 2014-04-08
- Inventor: Sadanori Yamanaka , Kazumasa Ueda , Yoshihiko Tsuchida
- Applicant: Sadanori Yamanaka , Kazumasa Ueda , Yoshihiko Tsuchida
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Chemical Company, Limited
- Current Assignee: Sumitomo Chemical Company, Limited
- Current Assignee Address: JP Tokyo
- Agency: Fitch, Even, Tabin & Flannery LLP
- Priority: JP2005-283155 20050929
- International Application: PCT/JP2006/319822 WO 20060927
- International Announcement: WO2007/037504 WO 20070405
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/36

Abstract:
A method for producing a group 3-5 nitride semiconductor includes the steps of (i), (ii), (iii) in this order: (i) placing inorganic particles on a substrate, (ii) epitaxially growing a semiconductor layer by using the inorganic particles as a mask, and (iii) separating the substrate and the semiconductor layer by irradiating the interface between the substrate and the semiconductor layer with light; and a method for producing a light emitting device further includes adding electrodes.
Public/Granted literature
- US20090117675A1 Method for Producing Group 3-5 Nitride Semiconductor and Method for Producing Light-Emitting Device Public/Granted day:2009-05-07
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