Invention Grant
US08691680B2 Method for fabricating memory device with buried digit lines and buried word lines
有权
具有埋地数字线和掩埋字线的存储器件的制造方法
- Patent Title: Method for fabricating memory device with buried digit lines and buried word lines
- Patent Title (中): 具有埋地数字线和掩埋字线的存储器件的制造方法
-
Application No.: US13182450Application Date: 2011-07-14
-
Publication No.: US08691680B2Publication Date: 2014-04-08
- Inventor: Kuo-Chen Wang
- Applicant: Kuo-Chen Wang
- Applicant Address: TW Kueishan, Tao-Yuan Hsien
- Assignee: Nanya Technology Corp.
- Current Assignee: Nanya Technology Corp.
- Current Assignee Address: TW Kueishan, Tao-Yuan Hsien
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L21/4763
- IPC: H01L21/4763

Abstract:
A method for fabricating a memory array includes providing a semiconductor substrate having thereon a plurality of line-shaped active areas and intermittent line-shaped trench isolation regions between the plurality of line-shaped active areas, which extend along a first direction; forming buried word lines extending along a second direction in the semiconductor substrate, the buried word lines intersecting with the line-shaped active areas and the intermittent line-shaped trench isolation regions, wherein the second direction is not perpendicular to the first direction; forming buried digit lines extending along a third direction in the semiconductor substrate, wherein the third direction is substantially perpendicular to the second direction; and forming storage nodes at storage node sites between the buried digit lines.
Public/Granted literature
- US20130015551A1 METHOD FOR FABRICATING MEMORY DEVICE WITH BURIED DIGIT LINES AND BURIED WORD LINES Public/Granted day:2013-01-17
Information query
IPC分类: