Invention Grant
- Patent Title: Group IV metal complexes for metal-containing film deposition
- Patent Title (中): 用于含金属膜沉积的IV族金属络合物
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Application No.: US13362077Application Date: 2012-01-31
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Publication No.: US08691710B2Publication Date: 2014-04-08
- Inventor: Wade Hampton Bailey, III , Sergei Vladimirovich Ivanov , Xinjian Lei , Moo-Sung Kim
- Applicant: Wade Hampton Bailey, III , Sergei Vladimirovich Ivanov , Xinjian Lei , Moo-Sung Kim
- Applicant Address: US PA Allentown
- Assignee: Air Products and Chemicals, Inc.
- Current Assignee: Air Products and Chemicals, Inc.
- Current Assignee Address: US PA Allentown
- Agent Rosaleen P. Morris-Oskanian
- Main IPC: C07D207/46
- IPC: C07D207/46 ; H01L21/70

Abstract:
Metal-containing complexes with general formula (1) (R1nPyr)(R2nPyr)ML1L2; or (2) [(R8XR9)(R1nPyr)(R2nPyr)]ML1L2 are disclosed; wherein M is a Group IV metal, Pyr is pyrrolyl ligand, n=1, 2 and 3, L1 and L2 are independently selected from alkoxide, amide or alkyl, L1 and L2 can be linked together, R1 and R2 can be same or different organic groups substituted at 2,3,4-positions of the pyrrole ring and are selected from the group consisting of linear and branched C1-6 alkyls, R8 and R9 are independently selected from the linear or branched chain alkylene group having 2-6 carbon atoms, and X is CH2 or oxygen. Methods of using the metal complexes as precursors to deposit metal or metal oxide films used for various devices in semi-conductor industries are also discussed.
Public/Granted literature
- US20130030191A1 Group IV Metal Complexes For Metal-Containing Film Deposition Public/Granted day:2013-01-31
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