Invention Grant
US08692215B2 Heated rotary seal and bearing for chilled ion implantation system
有权
加热旋转密封和轴承用于冷冻离子注入系统
- Patent Title: Heated rotary seal and bearing for chilled ion implantation system
- Patent Title (中): 加热旋转密封和轴承用于冷冻离子注入系统
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Application No.: US13116661Application Date: 2011-05-26
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Publication No.: US08692215B2Publication Date: 2014-04-08
- Inventor: William D. Lee , William DiVergilio , Steve Drummond
- Applicant: William D. Lee , William DiVergilio , Steve Drummond
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J29/00

Abstract:
A workpiece scanning system is provided having a scan arm that rotates about a first axis and a chilled end effector rotatably coupled to the scan arm about a second axis for selectively securing a workpiece. The chilled end effector has a clamping plate and one or more cooling mechanisms for cooling the clamping plate. A bearing is positioned along the second axis and rotatably couples the end effector to the scan arm, and a seal is positioned along the second axis to provide a pressure barrier between an external environment and an internal environment. One or more of the bearing and seal can have a ferrofluid associated therewith. A heater assembly is positioned proximate to the bearing and seal, wherein the heater assembly selectively provides a predetermined amount of heat to the bearing and seal, therein increasing a propensity of the end effector to rotate about the second axis.
Public/Granted literature
- US20110291023A1 HEATED ROTARY SEAL AND BEARING FOR CHILLED ION IMPLANTATION SYSTEM Public/Granted day:2011-12-01
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