Invention Grant
- Patent Title: High consistency resistive memory and manufacturing method thereof
- Patent Title (中): 高一致性电阻记忆及其制造方法
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Application No.: US13809966Application Date: 2011-07-14
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Publication No.: US08692224B2Publication Date: 2014-04-08
- Inventor: Yinyin Lin , Lingming Yang
- Applicant: Yinyin Lin , Lingming Yang
- Applicant Address: CN Shanghai
- Assignee: Fudan University
- Current Assignee: Fudan University
- Current Assignee Address: CN Shanghai
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: CN201010228039 20100716
- International Application: PCT/CN2011/001162 WO 20110714
- International Announcement: WO2012/006869 WO 20120119
- Main IPC: H01L47/00
- IPC: H01L47/00

Abstract:
The present invention relates to the technical field of memories, and in particular to a highly-consistent resistive memory and method of fabricating the same. The resistive memory comprises: a lower electrode which is formed in a first dielectric layer by patterning; a second dielectric layer formed on the lower electrode and the first dielectric layer and provided with an opening for exposing the lower electrode to perform patterning; an edge wall formed in the opening of the second dielectric layer for covering a border area of the lower electrode and the first dielectric layer so that only the middle area of the lower electrode is partially or totally exposed; a storage medium layer formed by performing oxidization with the second dielectric layer and the edge wall as mask; and an upper electrode. The resistive memory exhibits good consistency and high reliability; moreover, unit size is mall, which is advantageous for improving storage characteristic. When an array of memories is formed by the resistive memories, a good consistency is obtained among multiple resistive memories.
Public/Granted literature
- US20130193397A1 High Consistency Resistive Memory and Manufacturing Method Thereof Public/Granted day:2013-08-01
Information query
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