Invention Grant
US08692225B2 Resistive memory device and fabrication method thereof 有权
电阻式存储器件及其制造方法

  • Patent Title: Resistive memory device and fabrication method thereof
  • Patent Title (中): 电阻式存储器件及其制造方法
  • Application No.: US13601819
    Application Date: 2012-08-31
  • Publication No.: US08692225B2
    Publication Date: 2014-04-08
  • Inventor: Nam Kyun Park
  • Applicant: Nam Kyun Park
  • Applicant Address: KR Gyeonggi-do
  • Assignee: SK Hynix Inc.
  • Current Assignee: SK Hynix Inc.
  • Current Assignee Address: KR Gyeonggi-do
  • Agency: IP & T Group LLP
  • Priority: KR10-2012-0055454 20120524
  • Main IPC: H01L29/06
  • IPC: H01L29/06
Resistive memory device and fabrication method thereof
Abstract:
A resistive memory device capable of suppressing disturbance between cells and a fabrication method thereof are provided. The resistive memory device includes a word line formed, in a first direction, on a semiconductor substrate, lower access structures, each having a pillar shape, formed on the word line, a first insulating layer formed around an outer circumference of each of the lower access structures, a heat-absorption layer formed on a surface of each of the to heat-absorption layers, a variable resistive material formed on the lower access structures, and an upper electrode formed on each variable resistive material.
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