Invention Grant
- Patent Title: High performance field-effect transistors
- Patent Title (中): 高性能场效应晶体管
-
Application No.: US13430457Application Date: 2012-03-26
-
Publication No.: US08692230B2Publication Date: 2014-04-08
- Inventor: Chongwu Zhou , Alexander Badmaev , Chuan Wang , Yuchi Che
- Applicant: Chongwu Zhou , Alexander Badmaev , Chuan Wang , Yuchi Che
- Applicant Address: US CA Los Angeles
- Assignee: University of Southern California
- Current Assignee: University of Southern California
- Current Assignee Address: US CA Los Angeles
- Agency: Fish & Richardson P.C.
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/08

Abstract:
A high performance field-effect transistor includes a substrate, a nanomaterial thin film disposed on the substrate, a source electrode and a drain electrode formed on the nanomaterial thin film, and a channel area defined between the source electrode and the drain electrode. A unitary self-aligned gate electrode extends from the nanomaterial thin film in the channel area between the source electrode and the drain electrode, the gate electrode having an outer dielectric layer and including a foot region and a head region, the foot region in contact with a portion of the nanomaterial thin film in the channel area. A metal layer is disposed over the source electrode, the drain electrode, the head region of the gate electrode, and portions of the nanomaterial thin film proximate the source electrode and the drain electrode in the channel area.
Public/Granted literature
- US20120248416A1 High Performance Field-Effect Transistors Public/Granted day:2012-10-04
Information query
IPC分类: