Invention Grant
US08692303B2 Solid-state imaging device, electronic device, and manufacturing method for solid-state imaging device 有权
固态成像装置,电子装置和固态成像装置的制造方法

  • Patent Title: Solid-state imaging device, electronic device, and manufacturing method for solid-state imaging device
  • Patent Title (中): 固态成像装置,电子装置和固态成像装置的制造方法
  • Application No.: US13533420
    Application Date: 2012-06-26
  • Publication No.: US08692303B2
    Publication Date: 2014-04-08
  • Inventor: Hiroyuki Ohri
  • Applicant: Hiroyuki Ohri
  • Applicant Address: JP
  • Assignee: Sony Corporation
  • Current Assignee: Sony Corporation
  • Current Assignee Address: JP
  • Agency: Sheridan Ross P.C.
  • Priority: JP2011-148882 20110705
  • Main IPC: H01L31/0224
  • IPC: H01L31/0224
Solid-state imaging device, electronic device, and manufacturing method for solid-state imaging device
Abstract:
In a manufacturing method for a solid-state imaging device, a photoelectric conversion portion including a first impurity layer whose carrier polarity is a first conductivity type is formed within a substrate, a second impurity layer, whose carrier polarity is a second conductivity type opposite to the first conductivity type, is formed on a surface of the first impurity layer so as to be in contact with the surface located on one surface side of the substrate, a third impurity layer, whose carrier polarity is the first conductivity type, is formed on the second impurity layer so as to be in contact therewith, a gate electrode is formed above the third impurity layer so as to cover the third impurity layer, and an impurity region portion, whose carrier polarity is the first conductivity type, is formed within the substrate so as to be connected to the third impurity layer.
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