Invention Grant
- Patent Title: Isolation structures for FinFET semiconductor devices
- Patent Title (中): FinFET半导体器件的隔离结构
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Application No.: US14065928Application Date: 2013-10-29
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Publication No.: US08692316B2Publication Date: 2014-04-08
- Inventor: Ruilong Xie
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
One illustrative device disclosed herein includes a plurality of fins separated by a trench formed in a semiconducting substrate, a first layer of insulating material positioned in the trench, the first layer of insulating material having an upper surface that is below an upper surface of the substrate, an isolation layer positioned within the trench above the first layer of insulating material, the isolation layer having an upper surface that is below the upper surface of the substrate, a second layer of insulating material positioned within the trench above the isolation layer, the second layer of insulating material having an upper surface that is below the upper surface of the substrate, and a gate structure positioned above the second layer of insulating material.
Public/Granted literature
- US20140054723A1 ISOLATION STRUCTURES FOR FINFET SEMICONDUCTOR DEVICES Public/Granted day:2014-02-27
Information query
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