Invention Grant
US08692321B2 Semiconductor device and method for forming the same 有权
半导体装置及其形成方法

  • Patent Title: Semiconductor device and method for forming the same
  • Patent Title (中): 半导体装置及其形成方法
  • Application No.: US13722728
    Application Date: 2012-12-20
  • Publication No.: US08692321B2
    Publication Date: 2014-04-08
  • Inventor: Seong Wan Ryu
  • Applicant: SK hynix Inc.
  • Applicant Address: KR Icheon
  • Assignee: SK Hynix Inc.
  • Current Assignee: SK Hynix Inc.
  • Current Assignee Address: KR Icheon
  • Priority: KR10-2012-0089572 20120816
  • Main IPC: H01L29/66
  • IPC: H01L29/66
Semiconductor device and method for forming the same
Abstract:
A semiconductor device includes a trench defined by etching a semiconductor substrate including a device isolation film and an active region, an active region protruded from a side and bottom of the trench, and a gate electrode surrounding the active region simultaneously while being buried in the trench.
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