Invention Grant
US08692337B2 Structure with a moving portion and a buried electrode for movement detection included in a multi-substrate configuration
有权
具有用于移动检测的移动部分和埋入电极的结构包括在多基板构造中
- Patent Title: Structure with a moving portion and a buried electrode for movement detection included in a multi-substrate configuration
- Patent Title (中): 具有用于移动检测的移动部分和埋入电极的结构包括在多基板构造中
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Application No.: US13546751Application Date: 2012-07-11
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Publication No.: US08692337B2Publication Date: 2014-04-08
- Inventor: Audrey Berthelot , Vincent Larrey , Jean-Philippe Polizzi , Marie-Hélène Vaudaine , Hemant Desai , Woo Tae Park
- Applicant: Audrey Berthelot , Vincent Larrey , Jean-Philippe Polizzi , Marie-Hélène Vaudaine , Hemant Desai , Woo Tae Park
- Applicant Address: FR Paris US TX Austin
- Assignee: Commissariat a l'energie atomique et aux energies alternatives,FREESCALE Semiconductor Inc
- Current Assignee: Commissariat a l'energie atomique et aux energies alternatives,FREESCALE Semiconductor Inc
- Current Assignee Address: FR Paris US TX Austin
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1156351 20110712
- Main IPC: H01L29/84
- IPC: H01L29/84
Abstract:
A device being a micro-system and/or a nano-system which includes a first substrate, having at least one lower electrode and at least one dielectric layer, and includes an intermediate substrate extending across a main plane of the device and including a moving portion. The intermediate substrate is attached, outside the moving portion, by molecular bonding to the first substrate. The moving portion faces at least a portion of the lower electrode. The device also includes an upper substrate, attached to the intermediate substrate. The moving portion is movable between the lower electrode and the upper substrate. The first, intermediate, and upper substrates extend in a plane parallel to the main plane of the device. The lower electrode detects a component of the movement of the moving portion perpendicular to the plane of the device.
Public/Granted literature
Information query
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