Invention Grant
- Patent Title: Apparatus and method for microelectromechanical systems device packaging
- Patent Title (中): 微机电系统器件封装的装置和方法
-
Application No.: US13085294Application Date: 2011-04-12
-
Publication No.: US08692366B2Publication Date: 2014-04-08
- Inventor: Xiaojie Xue , Carl Raleigh
- Applicant: Xiaojie Xue , Carl Raleigh
- Applicant Address: US MA Norwood
- Assignee: Analog Device, Inc.
- Current Assignee: Analog Device, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Knobbe, Martens, Olson & Bear LLP
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
A MEMS package includes a substrate having an L-shaped cross-section. The substrate includes a vertical portion having a front surface and a back surface, and a horizontal portion protruding from a lower part of the front surface of the vertical portion, wherein the front surface of the vertical portion includes a mounting region. A MEMS die is mounted on the mounting region such that the MEMS die is oriented substantially parallel to the front surface; a lid attached to the front surface of the substrate while covering the MEMS die; and a plurality of leads formed on a bottom surface of the substrate. The leads can extend substantially parallel to one another, and substantially perpendicular to the front surface. The MEMS die can be oriented substantially perpendicular to a PCB substrate on which the package is mounted.
Public/Granted literature
- US20120080764A1 APPARATUS AND METHOD FOR MICROELECTROMECHANICAL SYSTEMS DEVICE PACKAGING Public/Granted day:2012-04-05
Information query
IPC分类: