Invention Grant
US08692385B2 Device for connecting nano-objects to external electrical systems, and method for producing said device
有权
用于将纳米物体连接到外部电气系统的装置以及用于制造所述装置的方法
- Patent Title: Device for connecting nano-objects to external electrical systems, and method for producing said device
- Patent Title (中): 用于将纳米物体连接到外部电气系统的装置以及用于制造所述装置的方法
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Application No.: US13311146Application Date: 2011-12-05
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Publication No.: US08692385B2Publication Date: 2014-04-08
- Inventor: Aurélie Thuaire , Xavier Baillin , Nicolas Sillon
- Applicant: Aurélie Thuaire , Xavier Baillin , Nicolas Sillon
- Applicant Address: FR Paris
- Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1061128 20101223
- Main IPC: H01L23/52
- IPC: H01L23/52 ; B82Y10/00

Abstract:
Device for connecting nano-objects to external electrical systems, and method for producing the device.According to the invention, which applies in particular to molecular characterization, a device including the following is produced: an upper layer equipped with upper contact pads to be connected to a nano-object; a lower layer, equipped with lower contact pads to be connected to an external electrical system; above the lower layer, a bonding layer including electrical through-vias in contact with the lower pads; and, between the bonding layer and the upper layer, at least two layers equipped with conductive lines and electrical vias, for connecting the upper pads to the lower pads.
Public/Granted literature
- US20120161333A1 DEVICE FOR CONNECTING NANO-OBJECTS TO EXTERNAL ELECTRICAL SYSTEMS, AND METHOD FOR PRODUCING SAID DEVICE Public/Granted day:2012-06-28
Information query
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