Invention Grant
US08692504B2 Apparatus and methods for determining an initially unknown commutation position of a member moved by a planar motor
有权
用于确定由平面电动机移动的构件的最初未知的换向位置的装置和方法
- Patent Title: Apparatus and methods for determining an initially unknown commutation position of a member moved by a planar motor
- Patent Title (中): 用于确定由平面电动机移动的构件的最初未知的换向位置的装置和方法
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Application No.: US13228254Application Date: 2011-09-08
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Publication No.: US08692504B2Publication Date: 2014-04-08
- Inventor: Scott Coakley , Radka Tezaur
- Applicant: Scott Coakley , Radka Tezaur
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Klarquist Sparkman, LLP
- Main IPC: G05B1/02
- IPC: G05B1/02

Abstract:
An exemplary stage apparatus has a motor, stage, and position-measuring device. The motor has a planar stator and moving-coil mover (planar motor). The stator is a checkerboard magnet array extending in an x-y plane and producing a magnetic field having a field period of 2π in a u-v coordinate system rotated 45° from the x-y coordinate system of the plane. The stage, coupled to the mover, moves with corresponding motions of the mover relative to the stator. The position-measurement device includes a first group of four magnetic-field sensors that are movable with the stage. The sensors are situated at integer multiples of π/2 from each other in u- and v-directions of the u-v coordinate system. The sensors produce respective data regarding a respective component of the magnetic field at, and hence the position of, the respective sensor within the period of the magnetic field.
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