Invention Grant
- Patent Title: Image correlation displacement sensor
- Patent Title (中): 图像相关位移传感器
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Application No.: US12898642Application Date: 2010-10-05
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Publication No.: US08692880B2Publication Date: 2014-04-08
- Inventor: Joseph Daniel Tobiason
- Applicant: Joseph Daniel Tobiason
- Applicant Address: JP Kawasaki-shi
- Assignee: Mitutoyo Corporation
- Current Assignee: Mitutoyo Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Christensen O'Connor Johnson Kindness PLLC
- Main IPC: H04N5/30
- IPC: H04N5/30

Abstract:
An image correlation displacement sensor for measuring a displacement component along a direction perpendicular to a target surface, with a simple configuration. The sensor may include: an illumination portion (130′) which emits illumination light; an imaging portion including at least two optical paths (A and B′) which are used to capture multiple images of a speckle field produced by the target surface (300), one of which (A) is inclined with respect to a normal to the target surface in proximity to the target surface, and an element (110′) which deflects an at least one of the optical paths (A and B′); and a processing portion (200) which measures a displacement relative to the target surface along a direction which includes a component normal to the target surface (300) in accordance with the correlation of multiple images captured in the optical paths (A) and (B′).
Public/Granted literature
- US20120081543A1 IMAGE CORRELATION DISPLACEMENT SENSOR Public/Granted day:2012-04-05
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