Invention Grant
US08692981B2 Evaluation device, measuring arrangement and method for path length measurement
有权
评估装置,路径长度测量的测量装置和方法
- Patent Title: Evaluation device, measuring arrangement and method for path length measurement
- Patent Title (中): 评估装置,路径长度测量的测量装置和方法
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Application No.: US13377410Application Date: 2010-06-10
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Publication No.: US08692981B2Publication Date: 2014-04-08
- Inventor: Bernd Spruck , Frank Hoeller , Cristina Alvarez Diez
- Applicant: Bernd Spruck , Frank Hoeller , Cristina Alvarez Diez
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss AG
- Current Assignee: Carl Zeiss AG
- Current Assignee Address: DE Oberkochen
- Agency: Sand & Sebolt
- Priority: DE102009024460 20090610
- International Application: PCT/EP2010/058139 WO 20100610
- International Announcement: WO2010/142758 WO 20101216
- Main IPC: G01C3/08
- IPC: G01C3/08

Abstract:
An evaluation device, measuring arrangement and method for path length measurement. The evaluation device for path length measurement is configured to evaluate a measured signal which represents an intensity of a sequence of pulses of electromagnetic radiation as a function of time. The sequence of pulses has a repetition rate. The evaluation device is configured to determine a phase difference between a component of the measured signal, the component oscillating with a frequency, and a reference signal which oscillates with the frequency. For this purpose, the evaluation device generates, for example by frequency mixing, a first signal and a second signal which have another phase difference, such that the first signal and the second signal each oscillates with another frequency which is different from said frequency, and that the other phase difference has a predetermined relation to the phase difference.
Public/Granted literature
- US20120092644A1 EVALUATION DEVICE, MEASURING ARRANGEMENT AND METHOD FOR PATH LENGTH MEASUREMENT Public/Granted day:2012-04-19
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